Aggregation methods for a scheduling problem on parallel machines in the photolithography area of the semiconductor manufacturing industry
Jeremy B.  1, @  , Stéphane Dauzere-Peres  2, @  , Claude Yugma  3, @  
1 : Département Sciences de la Fabrication et Logistique
Mines Saint-Etienne, Univ Clermont Auvergne, CNRS, UMR 6158 LIMOS, Centre CMP, STMicroelectronics
2 : Département Sciences de la Fabrication et Logistique  (SFL-ENSMSE)  -  Site web
Ecole Nationale Supérieure des Mines de Saint-Etienne, CMP-GC
880, route de Mimet 13541 GARDANNE - FRANCE -  France
3 : Ecole Nationale Supérieure des Mines de Saint-Etienne, Centre Microélectronique de Provence  (EMSE-CMP)  -  Site web
Ministère du Redressement productif
CMP - Site Georges Charpak 880, route de Mimet F-13541 Gardanne - France -  France

Semiconductor manufacturing includes the most complex manufacturing processes. Scheduling problems to be addressed at the operational level involve a rich set of constraints and criteria. As a result, optimization algorithms are increasingly preferred over dispatching rules, especially in complex production areas such as the photolithography area which is considered in this paper.

Type : : Article
Thématiques : Session "Heuristics and approximation algorithms for scheduling problems" du GT GOTHA
Mots-Clés : Operations research ; Scheduling ; Approximation methods ; Semiconductor Industry ; Multi ; objective optimization
Personnes connectées : 4 Vie privée
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